This happened to me last week, when I tried to create a new site collection based on Publishing template, I received an error “VariationRootPageLayout.aspx is invalid”, or “audit.xlsx is invalid” if Team template was chosen.
This is something very weird at the first look. Eventually this blog http://sadomovalex.blogspot.ca/2012/04/one-problem-with-site-creation-in.html gave me a clue. The culprit was the RBS setting.
So just make sure you have set all the checkboxes!